EB-13: MASS SPECTROMETER HELIUMLEAK TEST PROCEDURE OUTBOARDThe purpose of this procedure is to define a method for mass spectrometer helium leak detection of high purity gas distribution components. This procedure isadapted from the Sematech Semaspec # :Outboard testing is the measurement of leakage from inside to outside of the test component when theexternal pressure is less than the internal pressure of the test GAS:High purity helium gas filtered to microns. See EB-12 for helium gas :Because of helium saturation of non-metallic materials used in some products, do not perform an internal orinboard leak test after an outboard leak test, and do not perform an inboard leak test after an internal leak preferred order of :Equipment calibration with a known reference standard leak must be performed prior to the beginning of thetest day, and again at the close of the day. The standard leak calibrator must itself be calibrated on a REPORTING:If the actual leak rate is to be reported, the sensitivity of the equipment must be 5 times greater than the leak tobe measured. If the sensitivity is not 5 times greater, the actual leak rate may be reported if the sensitivity ofthe detector is also O-RING TYPE QUICK TEST PLUGS TO OUTLET AND ANY GAUGE LEAK TEST ADAPTER TO INLET PORT WITH O-RING TYPE QUICK TEST FITTING. CONNECT ADAPTER TO LEAK TEST A PIECE OF TAPE OVER THE VENT HOLE IN THE BONNET OF THE IN ADJUSTING SCREW ABOUT TWO TURNS, OR 1/2-TURN AFTER IT MAKES CONTACT WITH SPRING CYCLE ON MACHINE. USE ONLY IN DIRECT FLOW HELIUM AROUND FITTINGS AND BASE OF CAP FOR AT LEAST 30 SECONDS. IF MACHINE INDICATES A LEAK IMMEDIATELY STOP TAPE FROM VENT HOLE ON BONNET. INSERT HOSE INTO THE HOLE AND FILL BONNET WITH HELIUM FOR AT LEAST 30 SECONDS. IMMEDIATELYREAPPLY TAPE. WATCH FOR THE PRESENCE OF LEAKS FOR AT LEAST 2-1/2 THAT INBOARD LEAKAGE DOES NOT EXCEED 1 X 10-9 ATM CC/SEC
EB-13 Helium Leak Test Procedures - GO Reg
EB-13: MASS SPECTROMETER HELIUM LEAK TEST PROCEDURE OUTBOARD The purpose of this procedure is to define a method for mass spectrometer helium leak detection of high purity gas distribution components.
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